26,750×7,750 including Smock room
1000(photo-room, 100)
22±3℃, Humidity : 50±10%
20 people occupancy for class
Equipment that maintains temperature for users
Equipment that cleans up all of the dust through filtered air
Equipment that maintains Cleanliness Level through Hepa Filter box. It collects even a minute particle of dust in the process.
Equipment that increases rate of air circulation in clean room by collecting a minute particle of dust.
A place that performs photo lithography to draw up semiconductor microstructure
Equipment to keep and provide gas
Equipment with which poisonous gas shall be lowered below TLV in the Semiconductor Process
Equipment to clean up pollutants such as dust, water, and so on in air and provide steady pressure and flux with level of 7.0㎏/㎠
System to recover heat occurring in production and process equipment
Equipment to cleanse and provide water in the process
Equipment to provide nitrogen in a gaseous condition through evaporating liquid nitrogen. GN2 supply system is connected through pipes from machining room. PN2 supply system uses ultrapure purifiers to lower down level of O2 and moisture below 1ppm
Commits natural drainage process of waste water from clean room through acid process tank(cap.5.0ton)
System that enables poisonous gas in clean room to be lowered below TLV and emit it into air
System to make poisonous gas and heat exhaust emitting in the clean room lowered below TLV (Application of ORG Filter Box)
Clean room monitoring system is equipment to maintain and manage to solve any problem and form database in an efficient way by monitoring gas storage facility and utility system
batch type
6inch wafer based, minium CD=3㎛
156×156㎜ single crystal silicon solar cell
| No | Course | Period | Hours | Numbr of students | Remarks |
|---|---|---|---|---|---|
| 1 | Course for PLC task professionals | 2013. 12 ~ 2014. 2 | 40 | 30 | |
| 2 | Course for PLC task professionals | 2014. 12 ~ 2015. 2 | 40 | 30 |
ulsan college